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 Fababrication of higt -aspect-ration micro stucres using uv-liga technology.
<strong>VNU Journal of Science: Mathematics - Physics</strong>, [S.l.], v. 21, n. 2, june 2005.
ISSN 2588-1124.
Available at: &lt;<a href="https://js.vnu.edu.vn/MaP/article/view/2337" target="_new">https://js.vnu.edu.vn/MaP/article/view/2337</a>&gt;. Date accessed: 25 nov. 2024.