@article{MaP, author = {Huong Ngo and Canh Ta and Phuong Nguyen and Long Nguyen}, title = { Studying the structure and some properties of R.F. magnetron sputtered ZnO:Al films}, journal = {VNU Journal of Science: Mathematics - Physics}, volume = {20}, number = {3AP}, year = {2017}, keywords = {}, abstract = {Abstracts}, issn = {2588-1124}, url = {https://js.vnu.edu.vn/MaP/article/view/4166} }