Thi Hong, Pham, 		Huu Tung, Dang, 		Hai Anh, Nguyen, 		Tuan Linh, Dang, 		Thi Thu Thao, Nguyen, 		Thuy Hien, Dinh, 		Minh Hieu, Nguyen, 		Minh Hue, Nguyen, 		Tran Thuat, Nguyen, 		Viet Tuyen, Nguyen, AND 		Quoc Hung, Nguyen.
" Fabricating Ultra-thin Silicon Nitride Membranes  Suspended on Silicon Wafer" <em>VNU Journal of Science: Mathematics - Physics</em> [Online], Volume 37 Number 1 (12 March 2021)