DUC VIET, Nguyen; 						THI THU HUONG, Hoang; 						NGOC THUY, Vu.
 Technologies for Ultrapure Water Production  in Semiconductor Industry.
<strong>VNU Journal of Science: Earth and Environmental Sciences</strong>, [S.l.], v. 41, n. 2S, nov. 2025.
ISSN 2588-1094.
Available at: &lt;<a href="https://js.vnu.edu.vn/EES/article/view/5427" target="_new">https://js.vnu.edu.vn/EES/article/view/5427</a>&gt;. Date accessed: 06 dec. 2025.
doi: <a href="https://doi.org/10.25073/2588-1094/vnuees.5427">https://doi.org/10.25073/2588-1094/vnuees.5427</a>.