DUNG, Dinh Van.
 Research on optimal silicon etching condition in TMAH solution and application for MEMS structure fabrication.
<strong>VNU Journal of Science: Mathematics - Physics</strong>, [S.l.], v. 25, n. 3, sep. 2009.
ISSN 2588-1124.
Available at: &lt;<a href="https://js.vnu.edu.vn/MaP/article/view/2646" target="_new">https://js.vnu.edu.vn/MaP/article/view/2646</a>&gt;. Date accessed: 22 nov. 2024.