DUNG, Dinh Van.
Research on optimal silicon etching condition in TMAH solution and application for MEMS structure fabrication.
VNU Journal of Science: Mathematics - Physics, [S.l.], v. 25, n. 3, sep. 2009.
ISSN 2588-1124.
Available at: <https://js.vnu.edu.vn/MaP/article/view/2646>. Date accessed: 22 nov. 2024.
