LUU, Nam Hoai; 						LUU, Tai Tuan.
 Fabrication of ultra thin sin film at  low temperature by using ECR plasma.
<strong>VNU Journal of Science: Mathematics - Physics</strong>, [S.l.], v. 20, n. 3AP, apr. 2017.
ISSN 2588-1124.
Available at: &lt;<a href="https://js.vnu.edu.vn/MaP/article/view/4172" target="_new">https://js.vnu.edu.vn/MaP/article/view/4172</a>&gt;. Date accessed: 05 dec. 2024.