Fabrication of ultra thin sin film at low temperature by using ECR plasma

Nam Hoai Luu, Tai Tuan Luu

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Published Apr 26, 2017

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LUU, Nam Hoai; LUU, Tai Tuan. Fabrication of ultra thin sin film at low temperature by using ECR plasma. VNU Journal of Science: Mathematics - Physics, [S.l.], v. 20, n. 3AP, apr. 2017. ISSN 2588-1124. Available at: <https://js.vnu.edu.vn/MaP/article/view/4172>. Date accessed: 29 apr. 2024.
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Vol 20 No 3AP
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Review Article

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