THI HONG, Pham et al.
 Fabricating Ultra-thin Silicon Nitride Membranes  Suspended on Silicon Wafer.
<strong>VNU Journal of Science: Mathematics - Physics</strong>, [S.l.], v. 37, n. 1, mar. 2021.
ISSN 2588-1124.
Available at: &lt;<a href="https://js.vnu.edu.vn/MaP/article/view/4518" target="_new">https://js.vnu.edu.vn/MaP/article/view/4518</a>&gt;. Date accessed: 22 dec. 2024.
doi: <a href="https://doi.org/10.25073/2588-1124/vnumap.4518">https://doi.org/10.25073/2588-1124/vnumap.4518</a>.