CHI, Nguyen Thi Quynh; MINH, Nguyen Duc; HUNG, Vu Ngoc. Impact of Geometry Dimension on Quality Factor and Mass-Sensitivity of PZT Thin Film-Based MicroCantilevers. VNU Journal of Science: Mathematics - Physics, [S.l.], v. 37, n. 3, sep. 2021. ISSN 2588-1124. Available at: <https://js.vnu.edu.vn/MaP/article/view/4581>. Date accessed: 24 nov. 2024. doi: https://doi.org/10.25073/2588-1124/vnumap.4581.