Design and Simulation of Micromachined Gyroscope based on Finite Element Method

Thang Nguyen Van, Tran Duc Tan, Chu Duc Trinh

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Published Sep 25, 2017
DOI: https://doi.org/10.25073/2588-1124/vnumap.4215

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How to Cite
NGUYEN VAN, Thang; TAN, Tran Duc; TRINH, Chu Duc. Design and Simulation of Micromachined Gyroscope based on Finite Element Method. VNU Journal of Science: Mathematics - Physics, [S.l.], v. 33, n. 3, sep. 2017. ISSN 2588-1124. Available at: <https://js.vnu.edu.vn/MaP/article/view/4215>. Date accessed: 22 nov. 2024. doi: https://doi.org/10.25073/2588-1124/vnumap.4215.
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Issue
Vol 33 No 3
Section
Review Article

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Abstract

This paper presents a design, simulation and analysis of a vibratory micromachining gyroscope. The gyroscope structure is based on the driving and sensing proof-mass configuration. The gyroscope dimensions are 1644 µm wide, 1754 µm long, 30µm thickness. The suspended spring consists of two silicon cantilevers of driving-mode and sensing-mode stiffness are 400 N/m and 165 N/m, respectively. Mass of driving proof-mass (including of 0.9408×10E-11 kg sensing proof-mass) is 0.5452×10E-7 kg. The simulated resonance frequency is 13324 Hz. The output signals are calculated based on the simulated vibration results. The structure is investigated with several input angular signals. The sensitivity of proposed structure is 100 mV/rad/s when ω changes from 0 to 1.6 rad/s.

Keywords: Gyroscope, Tuning Fork Gyroscope, Comsol Multiphysics and Gyroscope.

References

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