Fabrication and Characteristics of Silica Nanoparticle Monolayer Assembled by Spin Coating
Main Article Content
Abstract
In this paper, we report on a process for fabricating silica nanoparticle monolayer based on chemical synthesis and spin-coating. Spherical silica nanoparticles were synthesized by Stöber method using tetraethylorthosilicate as precursor. Close-packed silica nanoparticle monolayer was realized by optimizing the speed of spin-coating. Based on analyzing field emission scanning electron microscope (FE-SEM) images, the average diameter of silica spheres was determined and found of about 196 nm, with a standard deviation approximately ± 40 nm. The reflectance for the silicon substrate with spherical silica nanoparticle monolayers has been experimentally investigated at various spin-coating speeds. The experimental results are compared to those obtained from simulation data. The obtained results are useful for developing substrates having nanostructures for various applications in photonics and plasmonics.
Keywords: Silica nanoparticles, Stöber method, spin coating, self-assembled monolayer
Keywords:
Silica nanoparticles, Stöber method, spin coating, self-assembled monolayer.
References
[1] E. Garnett, P. Yang, Light Trapping in Silicon Nanowire Solar Cells, Nano Lett., Vol. 10, No. 3, 2010, pp. 1082-1087, https://doi.org/10.1021/nl100161z.
[2] P. R. Pudasaini, F. R. Zepeda, M. Sharma, D. Elam, A. Ponce, and A. A. Ayon, High Efficiency Hybrid Silicon Nanopillar–polymer Solar Cells, ACS Appl. Mater. Interfaces, Vol. 5, No. 19, 2013, pp. 9620-9627, https://doi.org/10.1021/am402598j.
[3] G. X. Li, Z. L. Wang, S. M. Chen, K. W. Cheah, Narrowband Plasmonic Excitation on Gold Hole-array Nanostructures Observed Using Spectroscopic Ellipsometer, Opt. Express, Vol. 19, No. 7, 2011, pp. 6348-6353, https://doi.org/10.1364/OE.19.006348.
[4] G. F. Walsh, L. D. Negro, Enhanced Second Harmonic Generation by Photonic–plasmonic Fano-type Coupling in Nanoplasmonic Arrays, Nano Lett., Vol. 13, No. 7, 2013, pp. 3111-3117, https://doi.org/10.1021/nl401037n.
[5] J. Jiang, X. Wang, S. Li, F. Ding, N. Li, S. Meng, R. Li, J. Qi, Q. Liu, G. L. Liu, Plasmonic Nano-arrays for Ultrasensitive Bio-sensing, Nanophotonics, Vol. 7, No. 9, 2018, pp. 1517-1531, https://doi.org/10.1515/nanoph-2018-0023.
[6] Y. Kanamori, K. Hane, Broadband Antireflection Subwavelength Gratings for Polymethyl Methacrylate Fabricated with Molding Technique, Opt. Rev., Vol. 9, No. 5, 2002, pp. 183-185, https://doi.org/10.1007/s10043-002-0183-0.
[7] Y. Kanamori, H. Katsube, T. Furuta, S. Hasegawa, K. Hane, Design and Fabrication of Structural Color Filters with Polymer-based Guided-mode Resonant Gratings by Nanoimprint Lithography, Jpn. J. Appl. Phys., Vol. 48, No. 6, 2009, pp. 06FH04, https://doi.org/10.1143/JJAP.48.06FH04.
[8] X. Q. Zhang, W. J. Salcedo, M. M. Rahmana, A. G. Brolo, Surface-enhanced Raman Scattering from Bowtie Nanoaperture Arrays, Surf. Sci., Vol. 676, 2018, pp. 39–45, https://doi.org/10.1016/j.susc.2018.02.003.
[9] G. A. Baker, D. S. Moore, Progress in Plasmonic Engineering of Surface-enhanced Raman-scattering Substrates Toward Ultra-trace Analysis, Anal. Bioanal. Chem., Vol. 382, 2005, pp. 1751-1770, https://doi.org/10.1007/s00216-005-3353-7.
[10] D. G. Choi, H. K. Yu, S. G. Jang, S. M. Yang, Colloidal Lithographic Nanopatterning via Reactive Ion Etching,
J. Am. Chem. Soc., Vol. 126, No. 22, 2004, pp. 7019-7025, https://doi.org/10.1021/ja0319083.
[11] P. Hanarp, D. S. Sutherland, J. Gold, B. Kasemo, Control of Nanoparticle Film Structure for Colloidal Lithography, Colloids Surf. A: Physicochem. Eng. Aspects, Vol. 214, No. 1-3, 2003, pp. 23-36, https://doi.org/10.1016/S0927-7757(02)00367-9.
[12] X. Liu, W. Liu, B. Yang, Deep-elliptical-Silver-nanowell Arrays (d-EAgNWAs) Fabricated by Stretchable Imprinting Combining Colloidal Lithography: A Highly Sensitive Plasmonic Sensing Platform, Nano Res.,
Vol. 12, 2019, pp. 845–853, https://doi.org/10.1007/s12274-019-2302-2.
[13] C. Feng, H. W. Choi, Density-tunable Non-close-packed Monolayer of Silica Nanospheres Prepared by Single-step Freeze-drying, J. Vac. Sci. Technol. B, Vol. 32, No. 5, 2014, pp. 051805, https://doi.org/10.1116/1.4895037.
[14] N. V. Minh, N. T. Hue, N. T. H Lien, C. M. Hoang, Close-packed Monolayer Self-assembly of Silica Nanospheres Assisted by Infrared Irradiation, Electron. Mater. Lett., Vol. 14, 2018, pp. 64-69, https://doi.org/10.1007/s13391-017-6389-x.
[15] W. Stöber, A. Fink, E. Bohn, Controlled Growth of Monodisperse Silica Spheres in the Micron Size Range,
J. Colloid Interface Sci., Vol. 26, No. 1, 1968, pp. 62–69, https://doi.org/10.1016/0021-9797(68)90272-5.
[16] T. H. L. Nghiem, T. N. Le, T. H. Do, T. T. Duong, V. Q. Hoa, D. H. N. Tran, Preparation and Characterization of Silica–Gold Core–shell Nanoparticles, J. Nanopart. Res., Vol. 15, 2013, pp. 2091, https://doi.org/10.1007/s11051-013-2091-6.
[17] Y. Yin, Y. Lu, B. Gates, Y. Xia, Template-assisted Self-assembly: A Practical Route to Complex Aggregates of Monodispersed Colloids with Well-defined Sizes, Shapes, and Structures, J. Am. Chem. Soc., Vol. 123, No. 36, 2001, pp. 8718-8729, https://doi.org/10.1021/ja011048v.
[18] N. Vogel, S. Goerres, K. Landfester, C. K. Weiss, A Convenient Method to Produce Close- and Non-close-packed Monolayers Using Direct Assembly at the Air–water Interface and Subsequent Plasma-Induced Size Reduction, Macromol. Chem. Phys., Vol. 212, No. 16, 2011, pp. 1719-1734, https://doi.org/10.1002/macp.201100187.
[19] M. Schmudde, C. Grunewald, C. Goroncy, C. N. Noufele, B. Stein, T. Risse, C. Graf, Controlling the Interaction and Non-close-packed Arrangement of Nanoparticles on Large Areas, ACS Nano, Vol. 10, No. 3, 2016,
pp. 3525-3535, https://doi.org/10.1021/acsnano.5b07782.
[20] X. Yan, J. Yao, G. Lu, X. Li, J. Zhang, K. Han, B. Yang, Fabrication of Non-close-packed Arrays of Colloidal Spheres by Soft Lithography, J. Am. Chem. Soc., Vol. 127, No. 21, 2005, pp. 7688-7689, https://doi.org/10.1021/ja0428208.
[21] P. Jiang, T. Prasad, M. J. McFarland, V. L. Colvin, Two-dimensional Nonclose-packed Colloidal Crystals Formed by Spincoating, Appl. Phys. Lett., Vol. 89, 2006, pp. 11908, https://doi.org/10.1063/1.2218832.
[22] N. V. Minh, N. N. Son, N. T. H. Lien, C. M. Hoang, Non-close Packaged Monolayer of Silica Nanoparticles on Silicon Substrate Using HF Vapor Etching, Micro & Nano Letters, Vol. 12, No. 9, 2017, pp. 656-659, https://doi.org/10.1049/mnl.2016.0825.
[23] S. S. Shinde, S. Park, Oriented Colloidal-crystal Thin Films of Polystyrene Spheres via Spin Coating, J. Semicond., Vol. 36, No. 2, 2015, pp. 023001, https://doi.org/10.1088/1674-4926/36/2/023001.
[24] P. Kozma, B. Fodor, A. Deak, P. Petrik, Optical Models for the Characterization of Silica Nanosphere Monolayers Prepared by the Langmuir-Blodgett Method Using Ellipsometry in the Quasistatic Regime, Langmuir, Vol. 26, No. 20, 2010, pp. 16122–16128, https://doi.org/10.1021/la1028838.
[25] G. H. Bogush, M. A. Tracy, C. F. Zukoski, Preparation of Monodisperse Silica Particles: Control of Size and Mass Fraction, J. Non-Cryst. Solids, Vol. 104, No. 1, 1988, pp. 95-106, https://doi.org/10.1016/0022-3093(88)90187-1.
[26] S. K. Park, K. D. Kim, H. T. Kim, Preparation of Silica Nanoparticles: Determination of the Optimal Synthesis Conditions for Small and Uniform Particles, Colloids Surf. A: Physicochem. Eng. Aspects, Vol. 197, No. 1-3, 2002, pp. 7-17, https://doi.org/10.1016/S0927-7757(01)00683-5.
[27] W. Stober, A. Fink, E. Bohn, Controlled Growth of Monodisperse Silica Spheres in the Micron Size Range, J. Colloid Interface Sci., Vol. 26, 1968, pp. 62-69, https://doi.org/10.1016/0021-9797(68)90272-5.
[28] G. H. Bogush, C. F. Zukoski, Studies of the Kinetics of the Precipitation of Uniform Silica Particles through the Hydrolysis and Condensation of Silicon Alkoxides, J. Colloid Interface Sci., Vol. 142, No. 1, 1991, pp. 1-18, https://doi.org/10.1016/0021-9797(91)90029-8.
[29] T. Ogi, L. B. M. Lopez, F. Iskandar, K. Okuyama, Fabrication of a Large Area Monolayer of Silica Particles on a Sapphire Substrate by a Spin Coating Method, Colloids Surf. A: Physicochem. Eng. Aspects, Vol. 297, No. 1-3, 2007, pp. 71-78, https://doi.org/10.1016/j.colsurfa.2006.10.027.
[30] S. Khanna, P. Marathey, Utsav, H. Chaliyawala, N. Rajaram, D. Roy, I. Mukhopadhyay, Fabrication of Long-ranged Close-packed Monolayer of Silica Nanospheres by Spin Coating, Colloids Surf. A: Physicochem. Eng. Aspects, Vol. 553, 2018, pp. 520-527, https://doi.org/10.1016/j.colsurfa.2018.05.063.
[31] M. A. Green, Self-consistent Optical Parameters of Intrinsic Silicon at 300K Including Temperature Coefficients, Sol. Energ. Mat. Sol. Cells, Vol. 92, No. 11, 2008, pp. 1305-1310, https://doi.org/10.1016/j.solmat.2008.06.009.
[32] H. H. Li., Refractive Index of Silicon and Germanium and Its Wavelength and Temperature Derivatives, J. Phys. Chem. Ref. Data, Vol. 9, No. 3, 1993, pp. 561-658, https://doi.org/10.1063/1.555624.
[2] P. R. Pudasaini, F. R. Zepeda, M. Sharma, D. Elam, A. Ponce, and A. A. Ayon, High Efficiency Hybrid Silicon Nanopillar–polymer Solar Cells, ACS Appl. Mater. Interfaces, Vol. 5, No. 19, 2013, pp. 9620-9627, https://doi.org/10.1021/am402598j.
[3] G. X. Li, Z. L. Wang, S. M. Chen, K. W. Cheah, Narrowband Plasmonic Excitation on Gold Hole-array Nanostructures Observed Using Spectroscopic Ellipsometer, Opt. Express, Vol. 19, No. 7, 2011, pp. 6348-6353, https://doi.org/10.1364/OE.19.006348.
[4] G. F. Walsh, L. D. Negro, Enhanced Second Harmonic Generation by Photonic–plasmonic Fano-type Coupling in Nanoplasmonic Arrays, Nano Lett., Vol. 13, No. 7, 2013, pp. 3111-3117, https://doi.org/10.1021/nl401037n.
[5] J. Jiang, X. Wang, S. Li, F. Ding, N. Li, S. Meng, R. Li, J. Qi, Q. Liu, G. L. Liu, Plasmonic Nano-arrays for Ultrasensitive Bio-sensing, Nanophotonics, Vol. 7, No. 9, 2018, pp. 1517-1531, https://doi.org/10.1515/nanoph-2018-0023.
[6] Y. Kanamori, K. Hane, Broadband Antireflection Subwavelength Gratings for Polymethyl Methacrylate Fabricated with Molding Technique, Opt. Rev., Vol. 9, No. 5, 2002, pp. 183-185, https://doi.org/10.1007/s10043-002-0183-0.
[7] Y. Kanamori, H. Katsube, T. Furuta, S. Hasegawa, K. Hane, Design and Fabrication of Structural Color Filters with Polymer-based Guided-mode Resonant Gratings by Nanoimprint Lithography, Jpn. J. Appl. Phys., Vol. 48, No. 6, 2009, pp. 06FH04, https://doi.org/10.1143/JJAP.48.06FH04.
[8] X. Q. Zhang, W. J. Salcedo, M. M. Rahmana, A. G. Brolo, Surface-enhanced Raman Scattering from Bowtie Nanoaperture Arrays, Surf. Sci., Vol. 676, 2018, pp. 39–45, https://doi.org/10.1016/j.susc.2018.02.003.
[9] G. A. Baker, D. S. Moore, Progress in Plasmonic Engineering of Surface-enhanced Raman-scattering Substrates Toward Ultra-trace Analysis, Anal. Bioanal. Chem., Vol. 382, 2005, pp. 1751-1770, https://doi.org/10.1007/s00216-005-3353-7.
[10] D. G. Choi, H. K. Yu, S. G. Jang, S. M. Yang, Colloidal Lithographic Nanopatterning via Reactive Ion Etching,
J. Am. Chem. Soc., Vol. 126, No. 22, 2004, pp. 7019-7025, https://doi.org/10.1021/ja0319083.
[11] P. Hanarp, D. S. Sutherland, J. Gold, B. Kasemo, Control of Nanoparticle Film Structure for Colloidal Lithography, Colloids Surf. A: Physicochem. Eng. Aspects, Vol. 214, No. 1-3, 2003, pp. 23-36, https://doi.org/10.1016/S0927-7757(02)00367-9.
[12] X. Liu, W. Liu, B. Yang, Deep-elliptical-Silver-nanowell Arrays (d-EAgNWAs) Fabricated by Stretchable Imprinting Combining Colloidal Lithography: A Highly Sensitive Plasmonic Sensing Platform, Nano Res.,
Vol. 12, 2019, pp. 845–853, https://doi.org/10.1007/s12274-019-2302-2.
[13] C. Feng, H. W. Choi, Density-tunable Non-close-packed Monolayer of Silica Nanospheres Prepared by Single-step Freeze-drying, J. Vac. Sci. Technol. B, Vol. 32, No. 5, 2014, pp. 051805, https://doi.org/10.1116/1.4895037.
[14] N. V. Minh, N. T. Hue, N. T. H Lien, C. M. Hoang, Close-packed Monolayer Self-assembly of Silica Nanospheres Assisted by Infrared Irradiation, Electron. Mater. Lett., Vol. 14, 2018, pp. 64-69, https://doi.org/10.1007/s13391-017-6389-x.
[15] W. Stöber, A. Fink, E. Bohn, Controlled Growth of Monodisperse Silica Spheres in the Micron Size Range,
J. Colloid Interface Sci., Vol. 26, No. 1, 1968, pp. 62–69, https://doi.org/10.1016/0021-9797(68)90272-5.
[16] T. H. L. Nghiem, T. N. Le, T. H. Do, T. T. Duong, V. Q. Hoa, D. H. N. Tran, Preparation and Characterization of Silica–Gold Core–shell Nanoparticles, J. Nanopart. Res., Vol. 15, 2013, pp. 2091, https://doi.org/10.1007/s11051-013-2091-6.
[17] Y. Yin, Y. Lu, B. Gates, Y. Xia, Template-assisted Self-assembly: A Practical Route to Complex Aggregates of Monodispersed Colloids with Well-defined Sizes, Shapes, and Structures, J. Am. Chem. Soc., Vol. 123, No. 36, 2001, pp. 8718-8729, https://doi.org/10.1021/ja011048v.
[18] N. Vogel, S. Goerres, K. Landfester, C. K. Weiss, A Convenient Method to Produce Close- and Non-close-packed Monolayers Using Direct Assembly at the Air–water Interface and Subsequent Plasma-Induced Size Reduction, Macromol. Chem. Phys., Vol. 212, No. 16, 2011, pp. 1719-1734, https://doi.org/10.1002/macp.201100187.
[19] M. Schmudde, C. Grunewald, C. Goroncy, C. N. Noufele, B. Stein, T. Risse, C. Graf, Controlling the Interaction and Non-close-packed Arrangement of Nanoparticles on Large Areas, ACS Nano, Vol. 10, No. 3, 2016,
pp. 3525-3535, https://doi.org/10.1021/acsnano.5b07782.
[20] X. Yan, J. Yao, G. Lu, X. Li, J. Zhang, K. Han, B. Yang, Fabrication of Non-close-packed Arrays of Colloidal Spheres by Soft Lithography, J. Am. Chem. Soc., Vol. 127, No. 21, 2005, pp. 7688-7689, https://doi.org/10.1021/ja0428208.
[21] P. Jiang, T. Prasad, M. J. McFarland, V. L. Colvin, Two-dimensional Nonclose-packed Colloidal Crystals Formed by Spincoating, Appl. Phys. Lett., Vol. 89, 2006, pp. 11908, https://doi.org/10.1063/1.2218832.
[22] N. V. Minh, N. N. Son, N. T. H. Lien, C. M. Hoang, Non-close Packaged Monolayer of Silica Nanoparticles on Silicon Substrate Using HF Vapor Etching, Micro & Nano Letters, Vol. 12, No. 9, 2017, pp. 656-659, https://doi.org/10.1049/mnl.2016.0825.
[23] S. S. Shinde, S. Park, Oriented Colloidal-crystal Thin Films of Polystyrene Spheres via Spin Coating, J. Semicond., Vol. 36, No. 2, 2015, pp. 023001, https://doi.org/10.1088/1674-4926/36/2/023001.
[24] P. Kozma, B. Fodor, A. Deak, P. Petrik, Optical Models for the Characterization of Silica Nanosphere Monolayers Prepared by the Langmuir-Blodgett Method Using Ellipsometry in the Quasistatic Regime, Langmuir, Vol. 26, No. 20, 2010, pp. 16122–16128, https://doi.org/10.1021/la1028838.
[25] G. H. Bogush, M. A. Tracy, C. F. Zukoski, Preparation of Monodisperse Silica Particles: Control of Size and Mass Fraction, J. Non-Cryst. Solids, Vol. 104, No. 1, 1988, pp. 95-106, https://doi.org/10.1016/0022-3093(88)90187-1.
[26] S. K. Park, K. D. Kim, H. T. Kim, Preparation of Silica Nanoparticles: Determination of the Optimal Synthesis Conditions for Small and Uniform Particles, Colloids Surf. A: Physicochem. Eng. Aspects, Vol. 197, No. 1-3, 2002, pp. 7-17, https://doi.org/10.1016/S0927-7757(01)00683-5.
[27] W. Stober, A. Fink, E. Bohn, Controlled Growth of Monodisperse Silica Spheres in the Micron Size Range, J. Colloid Interface Sci., Vol. 26, 1968, pp. 62-69, https://doi.org/10.1016/0021-9797(68)90272-5.
[28] G. H. Bogush, C. F. Zukoski, Studies of the Kinetics of the Precipitation of Uniform Silica Particles through the Hydrolysis and Condensation of Silicon Alkoxides, J. Colloid Interface Sci., Vol. 142, No. 1, 1991, pp. 1-18, https://doi.org/10.1016/0021-9797(91)90029-8.
[29] T. Ogi, L. B. M. Lopez, F. Iskandar, K. Okuyama, Fabrication of a Large Area Monolayer of Silica Particles on a Sapphire Substrate by a Spin Coating Method, Colloids Surf. A: Physicochem. Eng. Aspects, Vol. 297, No. 1-3, 2007, pp. 71-78, https://doi.org/10.1016/j.colsurfa.2006.10.027.
[30] S. Khanna, P. Marathey, Utsav, H. Chaliyawala, N. Rajaram, D. Roy, I. Mukhopadhyay, Fabrication of Long-ranged Close-packed Monolayer of Silica Nanospheres by Spin Coating, Colloids Surf. A: Physicochem. Eng. Aspects, Vol. 553, 2018, pp. 520-527, https://doi.org/10.1016/j.colsurfa.2018.05.063.
[31] M. A. Green, Self-consistent Optical Parameters of Intrinsic Silicon at 300K Including Temperature Coefficients, Sol. Energ. Mat. Sol. Cells, Vol. 92, No. 11, 2008, pp. 1305-1310, https://doi.org/10.1016/j.solmat.2008.06.009.
[32] H. H. Li., Refractive Index of Silicon and Germanium and Its Wavelength and Temperature Derivatives, J. Phys. Chem. Ref. Data, Vol. 9, No. 3, 1993, pp. 561-658, https://doi.org/10.1063/1.555624.