Au/SnO₂ Thin-film NO₂ Gas Sensors: Fabrication and Characterization
Main Article Content
Keywords:
Nitrogen Dioxide (NO₂) gas sensor, SnO₂/Au thin films, signal measurement system
References
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[9] A. S. Reddy, N. M. Figueiredo, A. Cavaleiro, Nanocrystalline SnO2 and Au:SnO2 Thin Films Prepared by Direct Current Magnetron Reactive Sputtering, Vacuum, Vol. 86, No. 9, 2012, pp. 1323-1327, https//doi.org/10.1016/j.vacuum.2011.12.006.
[10] J. Wawrzyniak, Advancements in Improving Selectivity of Metal Oxide Semiconductor Gas Sensors Opening New Perspectives for Their Application in Food Industry, Sensors, Vol. 23, No. 23, 2023, pp. 9548, https//doi.org/10.3390/s23239548.
[11] B. Zhang et al., High-Performance Room-Temperature NO2 Gas Sensor Based on Au-Loaded SnO2 Nanowires under UV Light Activation, Nanomaterials, Vol. 12, No. 22, 2022, pp. 4062, https//doi.org/10.3390/nano12224062.
[12] J. Song et al., NO2 Sensing Capability of Pt-Au-SnO2 Composite Nanoceramics at Room Temperature, Molecules, Vol. 28, No. 4, 2023, pp. 1759, https//doi.org/10.3390/molecules28041759.
[13] M. V. Nikolic, V. Milovanovic, Z. Z. Vasiljevic, Z. Stamenkovic, Semiconductor Gas Sensors: Materials, Technology, Design, and Application, Sensors, Vol. 20, No. 22, 2020, pp. 6694 , https//doi.org/10.3390/s20226694.
[14] S. Uma, M. K. Shobana, Metal Oxide Semiconductor Gas Sensors in Clinical Diagnosis and Environmental Monitoring, Sensors Actuators A Phys., Vol. 349, 2023, pp. 114044, https//doi.org/10.1016/j.sna.2022.114044.
[15] X. Zhou, Z. Ying, X. He, C. Zhang, X. Zheng, P. Zheng, Enhanced Sensing Performance of Au-decorated Cellulose Nanofiber-SnO2 for NO2 Detection Under UV Light, J. Electron. Mater., Vol. 52, No. 9, 2023,
pp. 5964-5974, https//doi.org/10.1007/s11664-023-10531-6.
[16] Q. A. Drmosh, Z. H. Yamani, A. K. Mohamedkhair, A. H. Y. Hendi, M. K. Hossain, A. Ibrahim, Gold Nanoparticles Incorporated SnO2 Thin Film: Highly Responsive and Selective Detection of NO2 at Room Temperature, Mater. Lett., Vol. 214, 2018, pp. 283-286, https//doi.org/10.1016/j.matlet.2017.12.013.
[17] Z. Wu et al., UV Irradiation of Au-Modified SnO2 Nanorods Enabling the Rapid Detection of Low-Concentration NO2 at Room Temperature, IEEE Sens. J., Vol. 23, No. 3, 2023, pp. 1803-1808, https//doi.org/10.1109/JSEN.2022.3230753.
[18] J. Zhang, X. Liu, S. Wu, M. Xu, X. Guo, S. Wang, Au Nanoparticle-decorated Porous SnO2 Hollow Spheres: A New Model for A Chemical Sensor, J. Mater. Chem., Vol. 20, No. 31, 2010, pp. 6453, https//doi.org/10.1039/c0jm00457j.
[19] H. Zhang, L. Wang, T. Zhang, Reduced Graphite oxide/SnO2/Au Hybrid Nanomaterials for NO2 Sensing Performance at Relatively Low Operating Temperature, RSC Adv., Vol. 4, No. 101, 2014, pp. 57436-57441, https//doi.org/10.1039/C4RA10474A.
[20] T. Suzuki, K. Kunihara, M. Kobayashi, S. Tabata, K. Higaki, H. Ohnishi, A Micromachined Gas Sensor Based on a Catalytic Thick Film/SnO2 Thin Film Bilayer and Thin Film Heater, Sensors Actuators B Chem., Vol. 109, No. 2, 2025, pp. 185-189, https//doi.org/10.1016/j.snb.2005.05.013.
[21] J. C. Chiou, S. W. Tsai, C. Y. Lin, Liquid Phase Deposition Based SnO2 Gas Sensor Integrated with TaN Heater on a Micro-Hotplate, IEEE Sens. J., Vol. 13, No. 6, 2013, pp. 2466-2473, https//doi.org/10.1109/JSEN.2013.2256780.
[22] S. W. Choi, S. H. Jung, S. S. Kim, Significant Enhancement of the NO2 Sensing Capability in Networked SnO2 Nanowires by Au Nanoparticles Synthesized Via γ-ray Radiolysis, J. Hazard. Mater., Vol. 193, 2011,
pp. 243-248, https//doi.org/10.1016/j.jhazmat.2011.07.053.
[2] G. D. Khuspe et al., Nanostructured SnO2 thin Films for NO2 gas Sensing Applications, Ceram. Int., Vol. 39,
No. 8, 2013, pp. 8673-8679, https//doi.org/10.1016/j.ceramint.2013.04.047.
[3] Y. J. Kwon, S. Y. Kang, P. Wu, Y. Peng, S. S. Kim, H. W. Kim, Selective Improvement of NO2 Gas Sensing Behavior in SnO2 Nanowires by Ion-Beam Irradiation, ACS Appl. Mater. Interfaces, Vol. 8, No. 21, 2016,
pp. 13646-13658, https//doi.org/10.1021/acsami.6b01619.
[4] T. Ueda, I. Boehme, T. Hyodo, Y. Shimizu, U. Weimar, N. Barsan, Enhanced NO2-Sensing Properties of Au-Loaded Porous In2O3 Gas Sensors at Low Operating Temperatures, Chemosensors, Vol. 8, No. 3, 2020, pp. 72, https//doi.org/10.3390/chemosensors8030072.
[5] C. S. Prajapati, N. Bhat, Growth Optimization, Morphological, Electrical and Sensing Characterization of V2O5 Films for SO2 Sensor Chip, in 2018 Ieee Sensors, Ieee, 2018, pp. 1-4, https//doi.org/10.1109/ICSENS.2018.8589650.
[6] Q. H. Wu, J. Li, S. G. Sun, Nano SnO2 Gas Sensors, Curr. Nanosci., Vol. 6, No. 5, 2010, pp. 525-538, https//doi.org/10.2174/157341310797574934.
[7] J. M. Rzaij, S. O. Nawaf, A. K. Ibrahim, A Review on Tin Dioxide Gas Sensor: the Role of the Metal Oxide Doping, Nanoparticles, and Operating Temperatures, World J. Adv. Res. Rev., Vol. 14, No. 1, 2022, pp. 051-062, https//doi.org/10.30574/wjarr.2022.14.1.0288.
[8] Y. C. Liang, Y. W. Hsu, Design of Thin-film Configuration of SnO2 –Ag2O Composites for NO2 Gas-sensing Applications, Nanotechnol. Rev., Vol. 11, No. 1, 2022, pp. 1842-1853, https//doi.org/10.1515/ntrev-2022-0111.
[9] A. S. Reddy, N. M. Figueiredo, A. Cavaleiro, Nanocrystalline SnO2 and Au:SnO2 Thin Films Prepared by Direct Current Magnetron Reactive Sputtering, Vacuum, Vol. 86, No. 9, 2012, pp. 1323-1327, https//doi.org/10.1016/j.vacuum.2011.12.006.
[10] J. Wawrzyniak, Advancements in Improving Selectivity of Metal Oxide Semiconductor Gas Sensors Opening New Perspectives for Their Application in Food Industry, Sensors, Vol. 23, No. 23, 2023, pp. 9548, https//doi.org/10.3390/s23239548.
[11] B. Zhang et al., High-Performance Room-Temperature NO2 Gas Sensor Based on Au-Loaded SnO2 Nanowires under UV Light Activation, Nanomaterials, Vol. 12, No. 22, 2022, pp. 4062, https//doi.org/10.3390/nano12224062.
[12] J. Song et al., NO2 Sensing Capability of Pt-Au-SnO2 Composite Nanoceramics at Room Temperature, Molecules, Vol. 28, No. 4, 2023, pp. 1759, https//doi.org/10.3390/molecules28041759.
[13] M. V. Nikolic, V. Milovanovic, Z. Z. Vasiljevic, Z. Stamenkovic, Semiconductor Gas Sensors: Materials, Technology, Design, and Application, Sensors, Vol. 20, No. 22, 2020, pp. 6694 , https//doi.org/10.3390/s20226694.
[14] S. Uma, M. K. Shobana, Metal Oxide Semiconductor Gas Sensors in Clinical Diagnosis and Environmental Monitoring, Sensors Actuators A Phys., Vol. 349, 2023, pp. 114044, https//doi.org/10.1016/j.sna.2022.114044.
[15] X. Zhou, Z. Ying, X. He, C. Zhang, X. Zheng, P. Zheng, Enhanced Sensing Performance of Au-decorated Cellulose Nanofiber-SnO2 for NO2 Detection Under UV Light, J. Electron. Mater., Vol. 52, No. 9, 2023,
pp. 5964-5974, https//doi.org/10.1007/s11664-023-10531-6.
[16] Q. A. Drmosh, Z. H. Yamani, A. K. Mohamedkhair, A. H. Y. Hendi, M. K. Hossain, A. Ibrahim, Gold Nanoparticles Incorporated SnO2 Thin Film: Highly Responsive and Selective Detection of NO2 at Room Temperature, Mater. Lett., Vol. 214, 2018, pp. 283-286, https//doi.org/10.1016/j.matlet.2017.12.013.
[17] Z. Wu et al., UV Irradiation of Au-Modified SnO2 Nanorods Enabling the Rapid Detection of Low-Concentration NO2 at Room Temperature, IEEE Sens. J., Vol. 23, No. 3, 2023, pp. 1803-1808, https//doi.org/10.1109/JSEN.2022.3230753.
[18] J. Zhang, X. Liu, S. Wu, M. Xu, X. Guo, S. Wang, Au Nanoparticle-decorated Porous SnO2 Hollow Spheres: A New Model for A Chemical Sensor, J. Mater. Chem., Vol. 20, No. 31, 2010, pp. 6453, https//doi.org/10.1039/c0jm00457j.
[19] H. Zhang, L. Wang, T. Zhang, Reduced Graphite oxide/SnO2/Au Hybrid Nanomaterials for NO2 Sensing Performance at Relatively Low Operating Temperature, RSC Adv., Vol. 4, No. 101, 2014, pp. 57436-57441, https//doi.org/10.1039/C4RA10474A.
[20] T. Suzuki, K. Kunihara, M. Kobayashi, S. Tabata, K. Higaki, H. Ohnishi, A Micromachined Gas Sensor Based on a Catalytic Thick Film/SnO2 Thin Film Bilayer and Thin Film Heater, Sensors Actuators B Chem., Vol. 109, No. 2, 2025, pp. 185-189, https//doi.org/10.1016/j.snb.2005.05.013.
[21] J. C. Chiou, S. W. Tsai, C. Y. Lin, Liquid Phase Deposition Based SnO2 Gas Sensor Integrated with TaN Heater on a Micro-Hotplate, IEEE Sens. J., Vol. 13, No. 6, 2013, pp. 2466-2473, https//doi.org/10.1109/JSEN.2013.2256780.
[22] S. W. Choi, S. H. Jung, S. S. Kim, Significant Enhancement of the NO2 Sensing Capability in Networked SnO2 Nanowires by Au Nanoparticles Synthesized Via γ-ray Radiolysis, J. Hazard. Mater., Vol. 193, 2011,
pp. 243-248, https//doi.org/10.1016/j.jhazmat.2011.07.053.