Preparation of transparent conducting Zno:Al films on glass substrates by r.f magnetron sputtering

Nguyen Duy Phuong, Ta Dinh Canh, Nguyen Ngoc Long, Nguyen Hong Viet

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Published Jun 15, 2002

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PHUONG, Nguyen Duy et al. Preparation of transparent conducting Zno:Al films on glass substrates by r.f magnetron sputtering. VNU Journal of Science: Mathematics - Physics, [S.l.], v. 18, n. 2, june 2002. ISSN 2588-1124. Available at: <https://js.vnu.edu.vn/MaP/article/view/3306>. Date accessed: 05 may 2024.
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Issue
Vol 18 No 2
Section
Review Article

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