Preparation of Pb(Zr, Ti)O3 thin films sputtered from a multi-element metallic target

Huy Thanh Nguyen, Hung Ngoc Vu, Thuy Phu Nguyen

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Published Apr 26, 2017

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NGUYEN, Huy Thanh; VU, Hung Ngoc; NGUYEN, Thuy Phu. Preparation of Pb(Zr, Ti)O3 thin films sputtered from a multi-element metallic target. VNU Journal of Science: Mathematics - Physics, [S.l.], v. 20, n. 1, apr. 2017. ISSN 2588-1124. Available at: <https://js.vnu.edu.vn/MaP/article/view/4112>. Date accessed: 04 may 2024.
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Vol 20 No 1
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Review Article

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