Studying the structure and some properties of R.F. magnetron sputtered ZnO:Al films

Huong Thu Ngo; Canh Dinh Ta; Phuong Duy Nguyen; Long Ngoc Nguyen

Huong Thu Ngo, Canh Dinh Ta, Phuong Duy Nguyen, Long Ngoc Nguyen

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Published Apr 26, 2017

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NGO, Huong Thu et al. Studying the structure and some properties of R.F. magnetron sputtered ZnO:Al films. VNU Journal of Science: Mathematics - Physics, [S.l.], v. 20, n. 3AP, apr. 2017. ISSN 2588-1124. Available at: <https://js.vnu.edu.vn/MaP/article/view/4166>. Date accessed: 05 dec. 2024.

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Vol 20 No 3AP

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