Characteristics of Ag-Doped ZnO Thin Films Prepared by Sputtering Method
Main Article Content
Abstract
This paper presents the preparation of Ag-doped ZnO bulk sample by solid state reaction and Ag-doped ZnO thin films by sputtering method. The effects of doping concentration (1, 2 and 4%) on the properties of the thin films were investigated. Various methods were utilized to investigate characteristics of the samples: X-ray diffraction, Raman scattering spectroscopy, photoluminescence, energy dispersive X-Ray spectroscopy, scanning electron microscopy,
atomic force microscope, absorption spectroscopy and Hall measurement. The study results show that Ag diffused into ZnO crystal lattice after heat treatment at 1,200oC. As-prepared thin film samples exhibited low resistivity in the order of 10-3Ω.cm. The film doped with 2% Ag shows the lowest resistivity of 1.8´10-3Ω.cm, which is potential for making transparent electrodes in optoelectronics.
Keywords:
Transparent conductive oxide, ZnO:Ag, sputtering, Hall measurement
References
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https://doi.org/10.1016/j.jcrysgro.2014.02.036
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https://doi.org/10.1063/1.3530631.
[8] L.N.Wang, L.Z.Hu, H.Q.Zhang, Y.Qiu, Y.Lang, G.Q.Liu, J.Y.Ji, J.X.Ma, Z.W.Zhao, Studying the Raman spectra of Ag doped ZnO films grown by PLD, Mater. Sci. Semicond. Process. 14(3–4) (2011) 274–277.
https://doi.org/10.1016/j.mssp.2011.05.004.
[9] M.A. Myers, V. Khranovskyy, J. Jian, J.H. Lee, H. Wang, H. Wang, Photoluminescence study of p-type vs. n-type Ag-doped ZnO films, J. Appl. Phys. 118 (6) ( 2015) 065702(1)-065702(7).
https://doi.org/10.1063/1.4928183.
[10] R.K. Gupta, K. Ghosh, P.K. Kahol, Effect of substrate temperature on structural and optoelectrical properties of silver doped zinc oxide thin films, Phys. E Low-Dimensional Syst. Nanostructures 42(7) (2010) 2000–2004.
https://doi.org/10.1016/j.physe.2010.03.010.
[11] I.S. Kim, E.K. Jeong, D.Y. Kim, M. Kumar, S.Y. Choi, Investigation of p-type behavior in Ag-doped ZnO thin films by E-beam evaporation, Appl. Surf. Sci. 255(7) (2009) 4011–4014.
https://doi.org/10.1016/j.apsusc.2008.10.117
[12] R. Deng et al., Influence of oxygen/argon ratio on structural, electrical and optical properties of Ag-doped ZnO thin films, J. Cryst. Growth 312 (11) (2010) 1813–1816. Doi:10.1016/j.jcrysgro.2010.02.042
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